Micro-diaphragm pumps require compact drives which can provide a continuous flow and variable flow rates. The small volumes per pumping cycle mean high cycle rates of up to several 10 kHz are necessary to achieve high flow rates.

Disk-shaped piezo actuators can be mounted directly on the diaphragm to deflect it. Larger ranges or forces can be achieved if a diaphragm or a piston is coupled directly to a piezoelectric actuator.