A-110 PIglide LC Linear Stage with Air Bearings

High-Performance Nanopositioning System for a Good Price

A-110 PIglide LC Linear Stage with Air Bearings
Product Description Specifications Downloads Quote / Order
  • Ideal for scanning applications or high-precision positioning
  • Cleanroom compatible
  • Size of the motion platform 160 mm × 200 mm
  • Travel ranges to 400 mm
  • Load capacity to 100 N

Product Overview

PIglide positioning systems have a magnetic linear motor, magnetically preloaded air bearings and an optical linear encoder: Noncontact and friction-free motion for the highest accuracy and reliability

Accessories and options

 

  • Encoder
  • PIglide Filter and Air Preparation Kits
  • Single and multi-axis motion controller
  • XY setups and individual configurations
  • Base plates made of granite and systems for reducing vibration

Application fields

PIglide positioning systems are ideally suited for many high-precision applications such as metrology, photonics, and precision scanning in semiconductor or flat panel display manufacturing.

Thanks to the friction-free motion, no particles are formed, which makes PIglide stages ideal for cleanroom applications.

Specifications

Datasheet A-110

Version / Date
2017-08-09
Version / Date
2017-08-09
Version / Date
2017-11-07
Document language
pdf - 1 MB
pdf - 1 MB
pdf - 1 MB

Downloads

Datasheet

Datasheet A-110

Version / Date
2017-08-09
Version / Date
2017-08-09
Version / Date
2017-11-07
Document language
pdf - 1 MB
pdf - 1 MB
pdf - 1 MB

Documentation

User Manual A110D0001

A-110 PIglide LC Linear Air Bearing Stages
Version / Date
2016-11-28
Document language English
pdf - 1 MB

3-D Models

A-110 STEP

Others

Whitepaper: Air Bearings: When to Use and When to Avoid in Your Motion Application

All Positioning Stages are not Created Equal. Author: Matt Reck, PI
Version / Date
WP4003 2015-09
Document language English
pdf - 3 MB

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50 mm travel range

A-110.050A1
PIglide LC Linear Stage, Air Bearing, 50 mm Travel Range, Linear Encoder with Sin/Cos Signal Transmission, 20 µm Signal Period, 3-Phase Linear Motor, 48 V
A-110.050C1
PIglide LC Linear Stage, Air Bearing, 50 mm Travel Range, Linear Encoder with A/B Quadrature Signal Transmission, 50 nm Sensor Resolution, 3-Phase Linear Motor, 48 V

100 mm travel range

A-110.100A1
PIglide LC Linear Stage, Air Bearing, 100 mm Travel Range, Linear Encoder with Sin/Cos Signal Transmission, 20 µm Signal Period, 3-Phase Linear Motor, 48 V
A-110.100C1
PIglide LC Linear Stage, Air Bearing, 100 mm Travel Range, Linear Encoder with A/B Quadrature Signal Transmission, 50 nm Sensor Resolution, 3-Phase Linear Motor, 48 V

200 mm travel range

A-110.200A1
PIglide LC Linear Stage, Air Bearing, 200 mm Travel Range, Linear Encoder with Sin/Cos Signal Transmission, 20 µm Signal Period, 3-Phase Linear Motor, 48 V
A-110.200C1
PIglide LC Linear Stage, Air Bearing, 200 mm Travel Range, Linear Encoder with A/B Quadrature Signal Transmission, 50 nm Sensor Resolution, 3-Phase Linear Motor, 48 V

300 mm travel range

A-110.300A1
PIglide LC Linear Stage, Air Bearing, 300 mm Travel Range, Linear Encoder with Sin/Cos Signal Transmission, 20 µm Signal Period, 3-Phase Linear Motor, 48 V
A-110.300C1
PIglide LC Linear Stage, Air Bearing, 300 mm Travel Range, Linear Encoder with A/B Quadrature Signal Transmission, 50 nm Sensor Resolution, 3-Phase Linear Motor, 48 V

400 mm travel range

A-110.400A1
PIglide LC Linear Stage, Air Bearing, 400 mm Travel Range, Linear Encoder with Sin/Cos Signal Transmission, 20 µm Signal Period, 3-Phase Linear Motor, 48 V
A-110.400C1
PIglide LC Linear Stage, Air Bearing, 400 mm Travel Range, Linear Encoder with A/B Quadrature Signal Transmission, 50 nm Sensor Resolution, 3-Phase Linear Motor, 48 V

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