V‐522 • V‐524 • V‐528 High-Dynamics PIMag® Linear Stage

Voice Coil Direct Drive with Direct Position Measuring

V‐522 • V‐524 • V‐528 High-Dynamics PIMag® Linear Stage
Product Description Specifications Downloads Quote / Order
  • Fast scanning and positioning
  • Travel ranges 5 mm, 10 mm, 20 mm
  • Scanning frequencies of more than 10 Hz
  • Max. velocity 250 mm/s
  • Crossed roller bearings for the highest precision

Reference-class linear stage

Linear stages with magnetic direct drives largely dispense with mechanical components in the drivetrain and the drive force acts directly on the motion platform. Together with precision bearings, a high travel accuracy and longer lifetime is achieved. The linear stages are particularly suitable for scanning applications.

PIMag® Voice coil

Voice coil drives consist of 2 essential components: A permanent magnet and a coil, which is located in the air gap of the magnetic field. When current flows through the coil, it moves in the magnetic field of the permanent magnet. The direction of motion depends on the polarity. Thanks to their low weight and friction-free drive principle, voice coil drives are particularly suitable for applications, which require high dynamics and high velocities at limited travel ranges. High scan frequencies and precision positioning are also possible with these drives, because they are free of the effects of hysteresis.

Crossed roller guide

With crossed roller guides, the point contact of the balls in ball guides is replaced by line contact of the hardened rollers. Consequently, they are considerably stiffer and need less preload, which reduces friction and allows smoother running. Crossed roller guides are also distinguished by high guiding accuracy and load capacity. Force-guided rolling element cages prevent cage creep.

Highly accurate position measuring with incremental encoder

Noncontact optical encoders measure the position directly at the platform with the greatest accuracy. Nonlinearity, mechanical play or elastic deformation have no influence on the measurement.

Fields of application

Industry and research. Metrology, photonics, and precision scanning in semiconductor or flat panel display manufacturing

Specifications

Datasheet

Datasheet V-522 • V-524 • V-528

Version / Date
2019-02-18
Version / Date
2019-02-18
Version / Date
2017-09-20
Document language
pdf - 2 MB
pdf - 2 MB
pdf - 2 MB

Downloads

Datasheet

Datasheet

Datasheet V-522 • V-524 • V-528

Version / Date
2019-02-18
Version / Date
2019-02-18
Version / Date
2017-09-20
Document language
pdf - 2 MB
pdf - 2 MB
pdf - 2 MB

Documentation

Documentation

Short Instructions MP163EK

V-408 / V-508 / V-52x / V-551 Positioners with PIMag® Drives
Version / Date
3.0.0 03/2019
Document language English
pdf - 1 MB
Documentation

User Manual V522T0002

V-522 / V-524 / V-528 PIMag® Voice Coil Linear Stages for 5 mm / 10 mm / 20 mm Travel Range
Version / Date
2018-05-23
Document language English
pdf - 1 MB

3-D Models

3-D Models

V-52x 3-D model

Quote / Order

Ask for a free quote on quantities required, prices, and lead times or describe your desired modification. All products available online can be ordered directly.

V-522.1AA
PIMag® Voice coil Linear stage, direct drive, velocity 250 mm/s, direct position measurement with incremental encoder, 5 mm travel range, cable exit in direction of motion
V-522.1AB
PIMag® Voice coil Linear stage, direct drive, velocity 250 mm/s, direct position measurement with incremental encoder, 5 mm travel range, cable exit orthogonal to direction of motion
V-524.1AA
PIMag® Voice coil Linear stage, direct drive, velocity 250 mm/s, direct position measurement with incremental encoder, 10 mm travel range, cable exit in direction of motion
V-524.1AB
PIMag® Voice coil Linear stage, direct drive, velocity 250 mm/s, direct position measurement with incremental encoder, 10 mm travel range, cable exit orthogonal to direction of motion
V-528.1AA
PIMag® Voice coil Linear stage, direct drive, velocity 250 mm/s, direct position measurement with incremental encoder, 20 mm travel range, cable exit in direction of motion
V-528.1AB
PIMag® Voice coil Linear stage, direct drive, velocity 250 mm/s, direct position measurement with incremental encoder, 20 mm travel range, cable exit orthogonal to direction of motion