P-562.6CD PIMars 6-Axis Piezo Stage System

High-precision Nanopositioning System with 6 Degrees of Freedom

P-562.6CD PIMars 6-Axis Piezo Stage System
Product Description Specifications Downloads Quote / Order
  • 6 motion axes: 3 × linear, 3 × rotational
  • Travel ranges to 200 µm linear and to 1 mrad tip/tilt angle
  • Parallel kinematics for faster response times and higher multi-axis accuracy
  • Highest linearity due to capacitive sensors
  • Zero-play, high-precision flexure guide system
  • Excellent scanning flatness
  • Clear aperture 66 mm × 66 mm
  • Outstanding lifetime due to PICMA® piezo actuators
  • UHV-compatible to 10-9 hPa

Fields of application

  • Scanning microscopy
  • Super-resolution microscopy
  • Biotechnology
  • Mask/wafer positioning
  • Sample positioning
  • Interferometry
  • Metrology

Outstanding lifetime thanks to PICMA® piezo actuators

The patented PICMA® piezo actuators are all-ceramic insulated. This protects them against humidity and failure resulting from an increase in leakage current. PICMA® actuators offer an up to ten times longer lifetime than conventional polymer-insulated actuators. 100 billion cycles without a single failure are proven.

Subnanometer resolution with capacitive sensors

Capacitive sensors measure with subnanometer resolution without contacting. They guarantee excellent linearity of motion, long-term stability, and a bandwidth in the kHz range.

High guiding accuracy due to zero-play flexure guides

Flexure guides are free of maintenance, friction, and wear, and do not require lubrication. Their stiffness allows high load capacity and they are insensitive to shock and vibration. They are 100 % vacuum compatible and work in a wide temperature range.

High tracking accuracy in the nanometer range due to parallel position measuring

All degrees of freedom are measured against a single fixed reference. Undesired crosstalk of motion to another axis can be actively compensated in real time (depending on the bandwidth) (active guiding). High tracking accuracy is achieved in the nanometer range even in dynamic operation.

Suitable for sophisticated vacuum applications

All components used in the piezo systems are are excellently suited for use in vacuum. No lubricant or grease is necessary for operating. Polymer-free piezo systems allow particularly low outgas rates.

Specifications

Datasheet P-562.6CD

Version / Date
2018-05-08
Version / Date
2018-05-08
Version / Date
2018-06-07
Version / Date
2018-07-19
Document language
pdf - 647 KB
pdf - 654 KB
pdf - 742 KB
pdf - 821 KB

Downloads

Datasheet

Datasheet P-562.6CD

Version / Date
2018-05-08
Version / Date
2018-05-08
Version / Date
2018-06-07
Version / Date
2018-07-19
Document language
pdf - 647 KB
pdf - 654 KB
pdf - 742 KB
pdf - 821 KB

3-D Models

P-562.6CD 3-D model

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