P-541.2 • P-542.2 XY Piezo Stage

Low-Profile XY Nanopositioning System with Large Aperture

P-541.2 • P-542.2 XY Piezo Stage
Product Description Specifications Downloads Quote / Order
  • Low profile for easy integration: 16.5 mm
  • Aperture 80 mm × 80 mm
  • Travel range to 200 µm × 200 µm
  • Parallel kinematics for faster response times and higher multi-axis accuracy
  • High dynamics direct-drive version
  • Sensor technology: Inexpensive strain gauge sensors or capacitive sensors for higher performance
  • Outstanding lifetime due to PICMA® piezo actuators
  • Combination possible with microscope stages for longer travel ranges

Fields of application

  • Scanning microscopy
  • High-throughput microscopy
  • Super-resolution microscopy
  • Mask/wafer positioning
  • Interferometry
  • Measuring technology
  • Biotechnology
  • Micromanipulation

Outstanding lifetime thanks to PICMA® piezo actuators

The patented PICMA® piezo actuators are all-ceramic insulated. This protects them against humidity and failure resulting from an increase in leakage current. PICMA® actuators offer an up to ten times longer lifetime than conventional polymer-insulated actuators. 100 billion cycles without a single failure are proven.

Subnanometer resolution with capacitive sensors

Capacitive sensors measure with subnanometer resolution without contacting. They guarantee excellent linearity of motion, long-term stability, and a bandwidth in the kHz range.

High guiding accuracy due to zero-play flexure guides

Flexure guides are free of maintenance, friction, and wear, and do not require lubrication. Their stiffness allows high load capacity and they are insensitive to shock and vibration. They are 100 % vacuum compatible and work in a wide temperature range.

Maximum accuracy due to direct position measuring

Motion is measured directly at the motion platform without any influence from the drive or guide elements. This allows optimum repeatability, outstanding stability, and stiff, fast-responding control.

High dynamics multi-axis operation due to parallel kinematics

In a parallel-kinematic multi-axis system, all actuators act on a common platform. The minimum mass inertia and the identical design of all axes allow fast, dynamic, and nevertheless precision motion.

Specifications

Datasheet P-541.2 • P-542.2

Version / Date
2018-04-16
Version / Date
2018-04-16
Version / Date
2018-07-11
Version / Date
2018-06-19
Document language
pdf - 735 KB
pdf - 1 MB
pdf - 905 KB
pdf - 820 KB

Downloads

Datasheet

Datasheet P-541.2 • P-542.2

Version / Date
2018-04-16
Version / Date
2018-04-16
Version / Date
2018-07-11
Version / Date
2018-06-19
Document language
pdf - 735 KB
pdf - 1 MB
pdf - 905 KB
pdf - 820 KB

Documentation

Short Instructions PZ240

P-5xx, P-6xx, P-7xx Piezo Positionings Systems
Version / Date
5.0.0
pdf - 908 KB

User Manual PZ244

P-541, P-542 XY Nanopositioning System with Large Clear Aperture
Version / Date
2013-03-21
Version / Date
2013-03-21
Document language
pdf - 687 KB
pdf - 683 KB

Overview Microscopy Accessories

PI Microscopy Sample Holders and Adapter Plates for Microscope Stages
Version / Date
2018-05-16
Version / Date
2018-05-16
Document language
pdf - 138 KB
pdf - 150 KB

3-D Models

P-541.2 3-D model

P-542.2 3-D model

Quote / Order

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Accessories

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