P-587 6-Axis Precision Piezo Stage

Long Travel Ranges, Direct Position Measuring

P-587 6-Axis Precision Piezo Stage
Product Description Specifications Downloads Quote / Order
  • For scanning and positioning in X, Y, Z, θX, θY, θZ
  • 800 µm × 800 µm × 200 µm linear travel range
  • Up to 1 mrad rotational angle
  • Parallel kinematics for faster response times and higher multi-axis accuracy
  • Capacitive sensors for highest linearity
  • Outstanding lifetime due to PICMA® piezo actuators
  • Zero-play, high-precision flexure guide system
  • Active compensation in all 6 degrees of freedom

Fields of application

  • Interferometry
  • Metrology
  • Nanoimprinting
  • Semiconductor tests
  • Semiconductor manufacturing

Outstanding lifetime thanks to PICMA® piezo actuators

The patented PICMA® piezo actuators are all-ceramic insulated. This protects them against humidity and failure resulting from an increase in leakage current. PICMA® actuators offer an up to ten times longer lifetime than conventional polymer-insulated actuators. 100 billion cycles without a single failure are proven.

Subnanometer resolution with capacitive sensors

Capacitive sensors measure with subnanometer resolution without contacting. They guarantee excellent linearity of motion, long-term stability, and a bandwidth in the kHz range.

High guiding accuracy due to zero-play flexure guides

Flexure guides are free of maintenance, friction, and wear, and do not require lubrication. Their stiffness allows high load capacity and they are insensitive to shock and vibration. They are 100 % vacuum compatible and work in a wide temperature range.

Automatic configuration and fast component exchange

Mechanics and controllers can be combined as required and exchanged quickly. All servo and linearization parameters are stored in the ID chip of the Sub-D connector of the mechanics. The autocalibration function of the digital controllers uses this data each time the controller is switched on.

Maximum accuracy due to direct position measuring

Motion is measured directly at the motion platform without any influence from the drive or guide elements. This allows optimum repeatability, outstanding stability, and stiff, fast-responding control.

Suitable for sophisticated vacuum applications

All components used in the piezo systems are are excellently suited for use in vacuum. No lubricant or grease is necessary for operating. Polymer-free piezo systems allow particularly low outgas rates.

Specifications

Datasheet P-587

Version / Date
2018-05-08
Version / Date
2018-05-08
Version / Date
2018-06-07
Document language
pdf - 635 KB
pdf - 643 KB
pdf - 728 KB

Downloads

Datasheet

Datasheet P-587

Version / Date
2018-05-08
Version / Date
2018-05-08
Version / Date
2018-06-07
Document language
pdf - 635 KB
pdf - 643 KB
pdf - 728 KB

Documentation

User Manual PZ251

P-587.6CD 6-Axis Nanopositioning System with Capacitive Sensors
Version / Date
2014-03-27
Version / Date
2014-03-27
Document language
pdf - 720 KB
pdf - 740 KB

Quote / Order

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