D-E30 Unipolar Capacitive Displacement Sensor (Flake)

Extensive Measurement Range, (Sub) Nanometer Measurement Resolution, and Compact Size

D-E30 Unipolar Capacitive Displacement Sensor (Flake)
Product Description Specifications Downloads
  • Noncontact measurement, which can be used for many kinds of applications, e.g., measuring the displacement, vibration, flatness/straightness, roundness/radial run-out deviation, aqueous layer thickness, etc.
  • Absolute position measuring with high linearity
  • Up to subnanometer measurement resolution
  • Measuring range up to 1,000 μm
  • Convenient for installation and integration
  • High sensor bandwidth
  • Option: Can be upgraded to invar material/vacuum

Capacitive displacement sensor with the highest measuring accuracy and longest lifetime

A unipolar capacitive sensor is a displacement sensor of direct measurements. The capacitive sensors measures the change in capacitance in the uniform electric field between the polar face and the measured face to obtain the displacement value. A noncontact measuring process ensures the highest resolution, linearity, and high bandwidth.

The combined use of the unipolar capacitive sensor and the signal processor can achieve a subnanometer measuring resolution and a bandwidth of up to 5 kHz. As for high dynamic measurement application, the measurement resolution below 5 kHz bandwidth still remains at the nanometer grade. The parallel installation between the polar face and measured face is able to make the unipolar capacitive sensor obtain a measurement linearity less than 0.1 %.

Guard ring electrode ensures a higher measurement linearity

The design of the unipolar capacitive sensor has a relatively large influence on the measurement linearity. Advanced guard ring design is adopted for the sensor, which eliminates the non-uniform electric field effect at the edge of the sensor pole and ensures a stable and even electric field measurement area between the polar face and measured face, thus greatly improving the linearity of the capacitive sensor.

High-precision processing

In order to achieve high-precision measuring performance, the stainless steel polar face of the unipolar capacitive sensor is refined by diamond tools according to a strict processing technique and processing tolerance, thus it has an extremely flat and smooth polar face. Key protection for the polar side shall be done during the usage.

Remote measurement

With the cooperation of a signal pre-amplifier, a total cable length of 1.5 m-6.5 m can be realized from the unipolar capacitive sensor to the signal processor; with the cooperation of a signal converter, the cable length between them can be longer than 6.5 m, which could meet the demand of remote measurement application.

Convenient for installation and integration

All flake unipolar capacitive sensors have 4mm thickness as well as two installation counter bores, which are convenient for installation and integration by user on or into equipment. Flake unipolar capacitive sensors have 1.5m cables, which can be connected to the signal processor or pre-amplifier/converter.

Linearity Test Report

Users must order the sensor together with connecting cables, signal preamplifiers/converters (if necessary) and signal processors. At the end of manufacturing, for the whole system ordered, PI China will calibrate the linearity, set linearization, gain and offset, etc., eliminate the influence of cable capacitance in the process of calibration, and provide the Linearity Test Report to users along with the goods.

The linearity of one measuring range can be calibrated by the unipolar capacitive sensor combined with the analog signal processor; the linearity of two measuring ranges can be calibrated by the sensor combined with the digital signal processor and the calibration parameters will be stored in the processor

During calibration, PI China measures and calibrates the linearity of the capacitive sensor with high-precision Zygo double-frequency laser interferometers and high-precision piezoceramic translation stages.

Customized sensor

Except for standard flake sensors, PI China can also customize the flake sensor of different measurement ranges, sizes and materials.

Bipolar flake capacitive sensor

For displacement sensors with higher measurement resolution and linearity, please refer to D-015/D-050/D-100 bipolar capacitive displacement sensor in PI (http://www.pi.ws), or customize bipolar capacitive sensors made by PI China.

Specifications

Datasheet D-E30

Version / Date
2017-06-14
Version / Date
2017-07-21
Document language
pdf - 324 KB
pdf - 468 KB

Downloads

Datasheet

Datasheet D-E30

Version / Date
2017-06-14
Version / Date
2017-07-21
Document language
pdf - 324 KB
pdf - 468 KB

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